- HMS3000
- HMS3300
- HMS5000
- HMS5300
- HMS5500
- HMS7000
- 자석세트
- 샘플 마운팅 보드
- 오믹 컨택 물질
- ETCP2000
- EPS300
- EPS500
- EPS1000
- RTP1300
- 초고온용 홀 효과 측정시스템
- 포토닉 홀 효과 측정시스템
- 웨이퍼 프로파일러(wafer profiler)
- 엘립소미터(Ellipsometer)
- 반사계(Reflectometer)
- HMS-3000R
작성일 : 13-12-27 17:27
[신제품] 반사계(Reflectometer)
 글쓴이 : 에코피아(…
조회 : 3,409  

SR300 Spectroscopic Reflectometer &
Film Thickness Measurement System

• Easy to set up
• Easy to operate with Window based software
• Advanced optics design for best system performance
• Array based detector system to ensure fast measurement
• Uniquely designed light source for better intensity stability
• There are four ways to adjust light intensity:
  - Power output adjustment by knob from power supply
  - Insert a filter into filter slot at light output exit port
  - Beam size adjustment
  - Integration time adjustment in Detector from TFProbe software
• Measure film thickness and Refractive Index up to 5 layers
• Allow to acquire reflection, transmission and absorption spectra in milliseconds
• Capable to be used for real time or in-line thickness, refractive index monitoring
• System comes with comprehensive optical constants database and library
• Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
• Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system, Multiple channel system, Large Spot for • direct measurement over patterned or featured structure
• Apply to many different type of substrates with different thickness
• Various accessories available for special configurations such as running measurement over the curve surface
• 2D and 3D output graphics and user friendly data management interface

System Configuration:
• Model: SR300
• Detector: CCD Array with 2048 pixels
• Light Source: High stability and long lifetime Halogen
• Light Delivery: Fiber Optics
• Stage: Black Anodized Aluminum Alloy with Easy Adjustment for sample height, 200mmx200mm size
• Software: TFProbe 2.2
• Communication: USB to Computer
• Measurement Type: Film thickness, reflection spectrum, refractive index
• Computer needed: P3 above with minimum 50 MB space
• Power: 110– 240 VAC /50-60Hz, 1.5 A
• Warranty: One year labor and parts
• Wavelength range: 400 to 1100 nm
• Spot Size: 500 µm to 5mm
• Sample Size: 200x200mm or 200 mm in diameter
• Substrate Size: up to 50mm thick
• Measurable thickness range*: 20 nm to 50 µm
• Measurement Time: 2 ms minimum
• Accuracy*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)
• Repeatability*: < 1 Ǻ (1 sigma from 50 thickness readings for 1500 Ǻ Thermal SiO2 on Si Wafer)

• Transmission Fixture for Transmission and Absorption Measurement (SR300RT)
• Micro spot for measuring small area down to 5 µm size (MSP300)
• Multiple Channel for simultaneously measurement at multiple locations (SR300xX)
• Mapping uniformity over 200 or 300 mm wafer (SRM300-200 /300)

• Semiconductor fabrication (PR, Oxide, Nitride..)
• Liquid crystal display (ITO, PR, Cell gap…..)
• Forensics, Biological films and materials
• Inks, Mineralogy, Pigments, Toners
• Pharmaceuticals, Medial Devices
• Optical coatings, TiO2, SiO2, Ta2O5…..
• Semiconductor compounds
• Functional films in MEMS/MOEMS
• Amorphous, nano and crystalline Si

Application Examples:
1. Measured thicknesses for three layers Nitride-Oxide-Nitride on Glass

2. Measured Thickness for thick coating

3. Measured Reflection Spectrum and Thickness for Nano-crystalline Si