:::ecopia:::
 
- HMS3000
- HMS3300
- HMS5000
- HMS5300
- HMS5500
- HMS7000
- 자석세트
- 샘플 마운팅 보드
- 오믹 컨택 물질
- ETCP2000
- EPS300
- EPS500
- EPS1000
- DARK BOX
- RTP1300
- 초고온용 홀 효과 측정시스템
- 포토닉 홀 효과 측정시스템
- 웨이퍼 프로파일러(wafer profiler)
- 엘립소미터(Ellipsometer)
- 반사계(Reflectometer)
- HMS-3000R
 
작성일 : 13-10-31 16:01
[신제품] 웨이퍼 프로파일러(wafer profiler)
 글쓴이 : 에코피아(…
조회 : 3,521  

웨이퍼 프로파일러(WAFER PROFILER CVP21)

ECV Measurement of Doping Profiles
 
Wafer Profiler CVP21:
The COMPLETE Solution.
COMPLETE Material Range:
Group IV: Si, Ge, SiC
Standard III-V: GaAs, InP, ...
Ternary: AlGaAs, GaInP, ...
Quaternary: AlGaInP, ...
Nitrides: GaN, AlGaN, AlInN, ...
II-VI: ZnO, CdTe, CdHgTe, ...

COMPLETE Sample Range:
Stacked layers no problem
No restrictions concerning substrate
Sample size: 4*2 mm² ... 8" Wafer

COMPLETE Resolution Range:
< 1012 cm-3 ... > 1021 cm-3 (*)
1 nm ... 100 μm (*)
(*) may depend on material type/ sample quality.
Please ask for sample measurements.

COMPLETE System:
HiRel - Calibration-free - Easy-to-Use
Wafer-Stepping - Camera-Control
Recipes - Auto-Load/Unload/Reload
Manual/SemiAuto/FullAuto
 
Typical results:

 
 
ECV Profiling - Solution Advantages: